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In-Line Wafer Surface Defect Inspection

ALTO-SD-150/200 For Transperent Wafers

ALTO-SD series is an In-line inspection system supplying high throughput, full surface defect inspection for all kinds of wafers including silicon, quartz, sapphire, compound and MEMS wafers. High-resolution camera optics plus LED illumination guarantee reliable detection of all local defects. It inspects defect size of 1~ 10 microns, configurable inspection resolution to optimize defect size vs. throughput. The system combines high-precision measurement, powerful data analysis and user-friendly operations.

 

Prcoess Time by resolution (optional 1 micron resolution)

Sec/per wafer

10 micron 5 micron 2.5 micron
2" wafer 2 sec 5 sec 10 sec
4" wafer 4 sec 10 sec 20 sec
6" wafer 5 sec 15 sec 30 sec

Systematic Defect Tracking

accurate defect capturing and classifcation

Sophisticated image analysis and defect classification, e.g. detection of Cracks, edge chips, scratches, stones, shells, holes, stains, bright and dark spots, dirt, particles, dabs, fatty residues . optional non-contact, 2-sided wafer ID reading/inspection capability.

from macro to micro

Position and type of the defects are indicated as symbols in the defect map. The exact defect data (position, size, type and further properties) are given in the defect list. All defects can be visualized by bit maps asillustrated on the top picture on left hand side.

Capture what microscope can. No error made.

This ALTO-SD system is an affordable solution to imporve your quality control by avoiding the the mis-detection by microscope-reading and enabling 100% product examination. Illustrated on bottom left picture is microscope image of the sme area of interest (2.5X magnification).

 

Intelligence

user recipe driven

parameter set allows easy adaptation to customer specific requirement:

  • Customizable layout and parameter
  • All relevant info in a single view
  • OK-NG indicator via “traffic light
  • Global Event and Defect counter
  • Simple Defect type represented by by colored symbols
  • “Mouse Click” on defect on the map to get detailed information

 

Questions?

write to us if you have any questions or you would like to request technical details or arrange a demo.

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